Abstract
Femtosecond laser induced two-photon polymerization has the advantages of high resolution and capability of true three-dimensional (3D) fabrication. In this work, a phase filter-based super-resolution tech- nique was adopted to reduce the size of focus spot in order to achieve exceeded diffraction limit fabrication resolution. The principle of phase modulation of a femtosecond laser was introduced, the parameters of the phase filter were optimized using a genetic algorithm, and then a 3D super-resolution annular phase filter was fabricated. Experimental results proved that the aspect ratio as well as the axial and radial sizes of so- lidified units was compressed by the optimized phase filter. A maximum aspect ratio compression ratio of 20.8% was achieved. The radial com- pression ratio of the modulated spot decreased with the increase of laser exposure amount, while the axial compression ratio and aspect ratio com- pression ratio increased. C 2011 Society of Photo-Optical Instrumentation Engineers
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