Abstract
To estimate the resolution of the SEM with an aberration corrector, some electron optical systems having multipole lenses are analyzed up to the seventh order using Lie algebra and differential algebra. It is shown that the high order combination aberrations can be decreased to less than 1 5 if the transfer lens system or retarding voltage system is applied. The systematic correction method of aperture aberration is described up to the fifth order or more. The resolution better than 0.3– 0.5 nm may be obtained at 1 keV beam energy using the correction devices.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
