Abstract
A method for improving lateral resolution and reducing imaging distortion of optical subtraction microscopy is proposed. First, an azimuthally polarized (AP) light is modulated by an annular aperture. Then, an image with higher lateral resolution is obtained by subtracting an image obtained by an annular AP beam from an image obtained by a radially polarized beam. The simulation results demonstrate that compared with the case without the annular aperture, negative side-lobes in the effective point spread function are effectively suppressed, and the imaging quality of subtraction microscopy is obviously enhanced.
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