Abstract
Optical fibers for propagating deep ultraviolet light were developed using fluorine doped silica glasses called modified fused silica. Optimizing the fiber drawing conditions improved the transmission of the fiber in the deep UV region. The transmittance of the fiber at 193 nm reached more than 65% per 1 m long without reflection loss. Significant absorption bands from defects were not observed throughout the wavelengths of the deep UV-visible-infrared region. Hydrogen-impregnation into the fibers suppressed the degradation of the transmission induced by irradiating with an ArF excimer laser and 4th harmonic generation of Nd:YAG laser. Transmission in the DUV region and resistance to laser irradiation were drastically improved compared to high OH silica fibers.
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