Resistivity correction factor for the four-probe method

Abstract

A modified method of obtaining the resistivity correction factor (RCF) is described. The system includes a rectangular parallelepiped sample and a four-probe array which consists of two circular (current) probes and two point (voltage) probes. The RCF can be obtained from the four-point probe method in conjunction with the proximity effect on the current probes. The RFC is evaluated numerically as a function of the width and thickness of sample, the spacing, radius, angle of rotation and location of probe array.