Resistivity Correction Factor for Four-Probe Method on Circular Semiconductors II

Abstract

A method which improves ease and accuracy of calculation of the resistivity correction factor (RCF) is described. The method applied for the system consists of a circular semiconductor and a four-probe array. The method of images is introduced to obtain the RCF. The equivalent current source and sink for circular current probes are derived by taking into account the image current probes as well as the actual current probes. Numerical evaluations show that for thicker samples the calculation of the RCF is speeded up, and decrease in the RCF due to the image current probes becomes remarkable in the vicinity of the sample edge.