Resistive Switching in Metal–Oxide–Semiconductor Structures with GeSi Nanoislands on a Silicon Substrate

Abstract

It is shown that self-forming GeSi nanoislands built into the dielectric–semiconductor interface in the Si(001)-based metal–oxide–semiconductor (MOS) structures with the SiOx and ZrO2(Y) dielectric layers obtained by magnetron sputtering initiate bipolar resistive switching without preliminary electroforming. The I–V characteristics and electrical parameters of the MOS structures in the high- and low-resistance states have been investigated. The change in the charge incorporated in the dielectric at the dielectric–semiconductor interface during resistive switching has been established, which is related to the formation and destruction of conducting filaments. The optically stimulated switching of the MOS structures with the ZrO2(Y) dielectric layer from the high- to low-resistance state has been observed, which is caused by an increase in the conductivity of the space charge region in the Si substrate due to the interband optical absorption in Si leading to the voltage redistribution between Si and ZrO2(Y). A difference between the shapes of the low-signal photovoltage spectra of the MOS structures in the spectral region of the Si intrinsic photosensitivity in the high- and low-resistance states related to the leakage of photoexcited carriers from Si into a metal electrode through filaments has been found.