Abstract

The present study covers the fabrication of indium tin oxide (ITO)/manganese dioxide (MnO2)/ITO capacitor-based transparent resistive random access memory (ReRAM) device. The ITO/MnO2/ITO device exhibits 80 % transparency in the visible region along with steady bipolar resistive switching characteristics. The conduction mechanism investigation reveals that the current in low resistance state (LRS) is governed by Ohmic conduction. However, the dominance of trap-controlled space charge limited conduction (SCLC) mechanism in high resistance state (HRS) was observed. The resistive switching phenomenon in ITO/MnO2/ITO device was caused due to the formation and rupture of conduction filament via electron trapping and de-trapping in oxide-related traps (oxygen vacancies). In terms of reliability, the MnO2-based device exhibits good endurance up to 104 cycles and long retention for 104 s at room-temperature as well as at 85 °C. Cumulative probability distribution shows resistance ratio of 103 between LRS and HRS, which is sufficient to read memory states. These outcomes suggest that the ITO/MnO2/ITO-based transparent ReRAM could be a futuristic see-through electronic device for artificial intelligence (AI) application.

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