Abstract
Electrostatically actuated MEMS switch with the active contact breaking mechanism is tested in a “hot” regime. In this mode the lifetime of the switch is sufficiently restricted by the electrical failure mechanisms occurring at the contacts. Input DC voltage is applied to the source electrode during the actuation, output voltage at the drain electrode is registered. Measurements of the working characteristics of the switch including actuation voltage, contact resistance and lifecycle are performed. Experimental data is compared with the results of finite element simulation.
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