Residual-based pattern center calibration in high-resolution electron backscatter diffraction

Abstract

High resolution electron backscatter diffraction is an emerging technique of micro-structural characterization which can be used for local elastic strain measurement. Pattern center (PC) coordinate, an important parameter which affects accuracy of HR-EBSD, should be carefully calibrated before calculation. An integrated digital image correlation (IDIC) algorithm can extract the deformation gradient tensor and return the residual between reference and targeted images simultaneously. We propose to use the residual value as a criterion to calibrate PC, as an accurate PC value, accompanied with sample tilt parameters, results in slightly lower level of residuals when using simulated diffraction patterns. Though the reduction of residual value is small in the calibration process, our experimental dataset shows that the calibrated PC value will reduce the retrieved Von Mises strain, which results from the reduction of phantom strain caused by errors in the initially-guessed PC values given by the commercial software DynamicS.