Abstract
The multilayer composite film stack is a common feature of the microsensors based on thin film technology. In this paper, we propose an analytical model to investigate the Young’s moduli, hardness, and residual stresses of the constitutive film layers of a multilayer film stack. A multilayer film stresses model is derived to evaluate the residual stress distributions in the constitutive film layers of a ZnO pyroelectric sensor. A good agreement among the multilayer film stresses model, the grain morphologies characterized by scanning electron microscopy, the mechanical properties testing by nanoindentation, and the voltage responsivity measurement of the ZnO pyroelectric sensor is found in this paper. The proposed multilayer film stresses model can therefore be used to quantitatively analyze the film stresses and proceed to the optimization of thin film deposition process.
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