Residual stress in lead titanate thin film on different substrates

Abstract

This paper describes the effect of thermal expansion coefficients of the substrates on the residual stress in lead titanate (PT) thin film. The residual stress in the film on the different substrates was calculated from the phonon mode shift. In addition, the dielectric constant for the film was calculated from the lattice mode frequency. As a result, the residual stress and the dielectric behavior depended upon the substrates.