Abstract
The first images taken with a scanning electron beam were published in 1935 by Max Knoll and the first description of the basic elements of a scanning electron microscope (SEM) were given by Manfred von Ardenne three years later. Despite initial promising results as early as 1942, it was not until the mid 1960s that Cambridge Instruments began producing and selling SEMs in large quantities. Since then the resolution and analytical capabilities of such instruments have improved continuously. Today more than 2000 SEMs are sold each year, mainly for use in materials research, the life sciences and quality control in the semiconductor industry.
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