Research progress on the preparations, characterizations and applications of large scale 2D transition metal dichalcogenides films

Abstract

Two-dimensional transition metal dichalcogenides (2D TMDCs) materials remained a hot research topic due to their unique structures and properties. A lot of transistors based on single crystalline 2D TMDCs flakes show excellent properties. However, the application of 2D TMDCs was limited due to the small size of single crystalline 2D-TMDCs flakes. In that case, many researchers turn to focus on 2D-TMDCs films which have much larger size up to 4 in. Herein, the preparation methods of large scale 2D TMDCs films, such as traditional chemical vapor deposition (CVD), Metal-organic Chemical Vapor Deposition (MOCVD), Atomic layer deposition (ALD), Physical Vapor Deposition (PVD), high temperature vulcanization and other methods were introduced. Meanwhile, the characterization of 2D TMDCs films by Optical microscope, Atomic Force Microscope (AFM), Raman spectrum, Photo Luminescence spectrum (PL), Transmission Electron Microscope (TEM), Low Energy Electron Diffraction (LEED) and X-ray Photoelectron Spectrum (XPS) were discussed in detail. Finally, the application of 2D TMDCs films in Field Effect Tube (FET), sensors, Flexible devices, Hydrogen evolution electrode as well as other catalytic studies were summarized. And the development and prospect of 2D TMDCs films are proposed.