Abstract
As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.
Highlights
Inertial switches are more and more widely used in automotive electronics, inertial navigation, and weapon equipment products [1,2,3,4,5,6]
Chen et al [2] introduced an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance, which consisted of a proof mass as the movable electrode, and the fixed electrode of the switch in the horizontal and vertical directions composed of two L-shaped flexible cantilever beams and a multi-hole crossbeam
By reducing the spring thickness and increasing the spring length, the design obtained lower stiffness and the threshold value was 5 g. They introduced the conceptual design of a new micro electromechanical system (MEMS) inertial microswitch, which adopted the method of direct contact sensing to eliminate the bouncing effect when the electrodes were in contact
Summary
Inertial switches are more and more widely used in automotive electronics, inertial navigation, and weapon equipment products [1,2,3,4,5,6]. When sufficient acceleration is sensed, the movable electrode contacts the fixed electrode and the external circuit is triggered [19]. This kind of switch with only acceleration excitation is superior to electrostatic and piezoelectric accelerometers because they avoid electromagnetic interference in applications [3]. Micromachines 2022, 13, 359 the movable electrode (mainly a suspended mass) comes into contact with a fixed electrode when the acceleration reaches its threshold. For the persistent inertial switch, the realization of the locking function is carried out by various structures, so the classification is mainly dependent on the feature structures. Persistent switches have an excellent contact effect due to special structural features or external auxiliary units
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