Abstract
Graphene nano-electromechanical resonant sensors have wide application in areas such as seawater desalination, new energy, biotechnology, and aerospace due to their small size, light weight, and high sensitivity and resolution. This review first introduces the physical and chemical properties of graphene and the research progress of four preparation processes of graphene. Next, the principle prototype of graphene resonators is analyzed, and three main methods for analyzing the vibration characteristics of a graphene resonant sheet are described: molecular structural mechanics, non-local elastic theory and molecular dynamics. Then, this paper reviews research on graphene resonator preparation, discussing the working mechanism and research status of the development of graphene resonant mass sensors, pressure sensors and inertial sensors. Finally, the difficulties in developing graphene nano-electromechanical resonant sensors are outlined and the future trend of these sensors is described.
Highlights
Non-local elastic theory, an extension of classical continuum theory proposes that the conservation laws of mass, energy, and momentum are valid for an object as a whole, but that arbitrarily small voxels divided by the object may not hold
This paper has reviewed the properties of single-layer graphene, four common graphene material preparation technologies, and the development of graphene resonators from the perspectives of experiments, vibration characteristic analysis and preparation process
This review focuses on the application of graphene resonators in mass, pressure and inertial measurements
Summary
As the core device in measurements, silicon micro-resonant sensors play an important role in atmospheric parameter measurement system, aerospace ground test system, industrial automation production, consumer electronic products, etc. [1–5]. It is difficult for these sensors to accurately measure weak force changes for space exploration, biomedical measurement, and ultra-micro-fine processing. This problem can be addressed by the birth of new materials, which has facilitated sensor development at a nanometer level. An outstanding new material is graphene with excellent structural and electromechanical properties. Graphene is a two-dimensional honeycomb crystal, composed only of carbon atoms [13] Due to this unique crystal structure, graphene has excellent electromechanical and mechanical properties. Scholars have carried out in-depth theoretical and experimental research on the mechanical, electrical [18–21], optical [19,22–26], thermal [27] and chemical properties of graphene [28,29], predicting its application potential for high-performance sensors [30–38]. This paper highlights high-performance graphene resonators, paving the way for future research on graphene nano-electromechanical resonant sensors
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