Abstract
Metal oxide thin film transistors (MOTFTs) have been attracting great attention, because TFT technology are suitable for the requirement of novel display technology such as high definition, large screen liquid crystal display (LCD) and active matrix organic light emitting diode (AMOLED) display, with their high mobility, good uniformity, simple process, low process temperature, and low cost. In this article, material, device structure, fabricating process and application of MOTFT are introduced, and factors that influence MOTFT performance have been discussed. We developed a new class of metal oxide materials, which has a highest mobility of 35 cm2/Vs, threshold voltage of 1.63 V, current on/off ratio of 109, and sub threshold swing of 0.21 V/decade. Based on our MOTFT panel, we have developed a first 3~5 inch color AMOLED screen, transparent AMOLED, and flexible AMOLED. This novel MOTFT panel has a booming future in novel display such as TFT-LCD and AMOLED.
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