Abstract
In view of the large voltage harmonics and low power density of the low-power ultrasonic power supply, a low-power ultrasonic power supply based on the cascade buck technology is proposed. The converter of the power supply is composed of two buck units in cascade, and the output of the unit is forward Sinusoidal half-wave DC voltage waveform, and then commutated by the full-bridge inverter every half cycle to output sine wave AC voltage waveform, can significantly reduce the voltage harmonics of the ultrasonic power supply, reduce the inductance of the matching network, and improve the ultrasonic wave Power density. Through the combination of voltage and current phase detection and PI regulator, the tracking resonance frequency is controlled. By analyzing the system structure, working principle and control strategy of the ultrasonic power supply, modeling and simulation are carried out on Matlab / Simulink, and the feasibility and effectiveness of the scheme are verified.
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