Abstract
This paper summarizes and classifies the theory and technology of various tilt sensors, introduces solid pendulum tilt sensors, liquid pendulum tilt sensors, gas pendulum tilt sensors, micro-electro-mechanical system (MEMS) tilt sensors, compounding tilt sensors, including several kinds of sensors developed by the research group, such as gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors restraining acceleration interference and so on; analyzes the theory, fundamental, configuration and advantages and disadvantages of all kinds of tilt sensors; points out the development directions and trends according to a great deal of materials analyzing and technology research.
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