Abstract

This paper presents the analysis of the source of Zero-Rate Out(ZRO) of MEMS vibratory gyroscopes. The temperature effects on the performance of MEMS gyroscopes is studied. Related experiments demonstrate that ZRO of MEMS vibratory changes significantly with temperature. On the basis of the ZRO analysis, a novel temperature compensation method is proposed, in which a compensation model is established by polynomial fitting using data of the drive signal output(DSO) and the ZRO. Experimental results show that the compensation method is effective and technically feasible for application.

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