Abstract
Since the flexible substrates are all organic plastics, the main problem in the manufacture of flexible devices is the mismatch and low adhesion between inorganic semiconductor crystals and organic plastics, so the detection stability under mechanical stress is an important factor affecting the performance of flexible ultraviolet (UV) photodetectors (PDs). In order to improve the detection stability of flexible UV PD, the substrates of polyethylene terephthalate (PET) and polyimide (PI) are used as flexible devices respectively for comparative study, and the growth material is selected with the piezoelectric effect ZnO-based material as the main research object. It is found that the ZnO film with AlZnO (AZO) buffer layer on the PI substrate has almost no cracks or peeling off. In addition, after 100 times of bending tests on PI substrate devices, although the detection performance is reduced compared with the detection performance before bending, it still maintains relatively high detection stability.
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