Abstract
An aluminum grating with period of 152 nm is designed and manufactured based on rigorous coupled wave analysis. Its transmissions of TM and TE waves are measured at 532 nm, 632.8 nm and 810 nm, respectively. From the agreement between the experimental results and simulations, a grating thickness of 80 ± 5 nm can be determined. The analysis of and experiments on the grating temperature dependence reveal its thermal stability in ambient conditions.
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