Research on the Measurement Method of Key Shape and Position Errors of Hemispherical Harmonic Oscillator

Abstract

Hemispherical resonance gyroscope originated in the 1960s. With its outstanding advantages of high precision, simple structure and long service life, it is increasingly widely used in aerospace, tactical weapons and other fields. The hemispherical resonator, the core part of the gyroscope, is a thin-walled part with high steepness curved surface and hard and brittle material. Limited by the current processing level, it is difficult to obtain good shape and position accuracy, resulting in uneven mass distribution and frequency cracking, which affects the accuracy of the gyroscope. Based on the precision machining of hemispherical resonator, this paper carries out the research on the measurement method of shape and position error, focuses on the measurement method of the roundness and end face of the resonator, uses the cylindricity meter to complete the measurement of the roundness error of the inner and outer hemispherical shell of the resonator, and uses the white light interferometer and the subaperture stitching technology to realize the measurement of the full aperture surface of the end face of the hemispherical shell. This work provides theoretical guidance for subsequent processing and is of great significance to improve the quality of harmonic oscillator.