Abstract
This paper proposes a POI displacement estimation method based on the functional optical fiber sensor and the phase modulation principle to improve the POI displacement estimation accuracy. First, the relation between the object deformation and the optic fiber lightwave phase is explained; the measurement principle of functional optical fiber sensor based on the heterodyne interference principle and its layout optimization method is proposed, and a POI displacement estimation model is presented based on the data approach. Secondly, a beam is taken as the simulation object, the optimal position and length of the optical fiber sensor are determined based on its simulation data. Finally, the experimental device is designed to verify the effectiveness of the POI displacement estimation method based on the optic fiber sensors. The frequency-domain plot of the signals shows that the optical fiber sensors can express the flexible deformation of the analyzed object well. The POI displacement estimation model with the fiber optic sensor signals as one of the inputs is constructed. Through estimating the test data, the error using the optical fiber sensor-based POI displacement estimation method proposed in this paper reduces by more than 61% compared to the rigid body-based assumption estimation method.
Highlights
High-performance motion systems, such as the wafer stage in the semiconductor industry continuously, call for higher throughput and accuracy, resulting in more challenges for the design in next-generation motion stages [1]
According to the above review, this paper proposes a POI displacement estimation method for ultra-precision motion systems based on the functional optical fiber sensors and the phase modulation principle
This paper proposes a POI displacement estimation method for ultra-precision motion systems based on the functional optical fiber sensor and the phase modulation principle
Summary
High-performance motion systems, such as the wafer stage in the semiconductor industry continuously, call for higher throughput and accuracy, resulting in more challenges for the design in next-generation motion stages [1]. In reference [13], the importance of the POI displacement estimation using the observer was evaluated from the positioning accuracy of the system through simulation analysis; the paper [14] analyzes the importance of the POI displacement estimation using the observer from the comparison of the magnitude of the flexibility of the closed-loop transfer function by building a single-degree-of-freedom experimental setup and introducing active control; the paper [15] illustrates the effectiveness of the POI displacement estimation using observer by comparing the amount of output information without the observer and with the observer The advantage of this method is that the internal state change mechanism of the system can be understood through the observer construction process. According to the above review, this paper proposes a POI displacement estimation method for ultra-precision motion systems based on the functional optical fiber sensors and the phase modulation principle. The validity of the POI displacement estimation model based on the optical fiber sensor is proved through comparative analysis
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