Abstract
In order to explore the dynamic variation rule of temperature distribution on surface of optical element, the temperaturerise effect of atmospheric plasma processing was analyzed by using simulation model, and the corresponding thermal stress mathematical model was established for fused silica. On this basis, the experiment of plasma processing was carried out, the dynamic variation rule of temperature distribution on surface of four materials of aluminum, aluminum alloy, SiC and fused silica during the atmospheric plasma processing was analyzed, and the verification and comparison with the simulation results were carried out. The results show that the arc discharge atmospheric plasma polishing technology can effectively remove the damage layer of fused silica optical element by physical polishing, and the simulation model can provide data support for the atmospheric plasma processing technology.
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