Abstract
Chip-scale LiDAR is the critical component of unmanned platform. We present a single channel FMCW LiDAR integrated module including InP FMCW laser, silicon optical phased array and InP-based balanced photodetector, which achieving the function of multi-target ranging. The integrated chip size is 1.65cm×1.65cm. Coupling efficiency between on-chip laser and silicon waveguide is 62.8%. Common mode rejection ratio of balanced detector is 53.08dB. Ranging accuracy of integrated FMCW LiDAR is 8.82cm.
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