Research on shape error of microstructure array fabricated by fly cutting

Abstract

Microstructural array optical elements have gained more and more attentions for its special properties in optics. Micro pyramid structure has been proved to be one of the most effective anti-reflective textures and has been extensively studied. Single point diamond cutting technology has been applied to the fabrication of microstructures with the advantages of high efficiency, low cost and high machining accuracy. This paper mainly studies the influence of machine tool error to the shape accuracy of pyramid fabricated by fly cutting. Analyzed the forms of shape error caused by cutting tool position shift, and proposed the method of restraining sub-groove error generation, through control the minimum single cutting depth to decrease the effect by machine tool error. The experiment results verified correctness of the theory, and fabricated micro pyramid array with no obvious shape error.