Abstract
The small range micro-table could realize many degrees of freedom driving by using several PZT actuators. The PZT actuator demonstrates superior characteristics of high displacement resolution, miniature size, high-frequency response, strong power, no generate heat etc. The quality of PZT power supply will impact the positioning accuracy of table directly. The development of miniaturized multi-channel high-precision PZT power supply and control methods have be introduced amply. By the application of the DLL library for data acquisition card and Timer control of VB, the real-time programmable output of control voltage was realized. According to the non-linearity of amplifier circuit, the control voltage and output voltage multinomial curves of PZT power supply were charted, and the relational expression of control voltage with output voltage was obtained by means of MATLAB. Experimental results indicate that the output voltage of eight channels shows good linearity, the nonlinear error is less than 0.023%. The research supplies further scientific ways to amend and reduce the effect of non-linearity error, and improve the positioning accuracy of the systems.
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