Research on pumping laws of different-shaped Roots rotors for multi-stage vacuum pump design

Abstract

Multi-stage Roots dry vacuum pumps are widely used in the semiconductor industry, metallurgy, pharmaceuticals, solar photovoltaic, thin film equipment, and other such fields. There are many combinations of rotors from the inlet to the exhaust of the multi-stage Roots vacuum pump. Depending on the application process of the multi-stage Roots vacuum pump, different rotation and self-combination designs are required. Currently, the pumping characteristics of different rotor types of the multi-stage Roots dry vacuum pump are not clear, and the combined design of the multi-stage pump rotor cannot be supported. In order to realize the applicability analysis of different rotors in different pressure ranges, a vacuum pump test platform and an adjustable rotor Roots experimental pump were designed. The pumping performance and power consumption of two-lobe Roots rotors, three-lobe Roots rotors and five-lobe Roots rotors in different pressure ranges were tested in experiments, and the internal flow conditions of multi-stage pump exhaust stages were numerically simulated. The results demonstrate that considering the ultimate performance and power consumption, the two-lobe Roots rotors and the three-lobe Roots rotors are more suitable for the exhaust pressure range of 1–10,000 Pa. With the increase of the exhaust pressure, the pumping performance of the three-lobe Roots rotors begins to gradually improve, and the pumping performance has obvious advantages. When the exhaust pressure exceeds 50,000 Pa, the advantages of the five-lobe Roots rotors gradually become obvious. The five-lobe Roots rotors can better handle the process of direct exhaust to atmosphere. The research methods and conclusions adopted in this paper can provide a reference for the design of the rotor combination scheme of the multi-stage Roots dry vacuum pump.