Abstract
In order to get the propagation characteristics of surface acoustic wave (SAW) along the piezoelectric crystals surface, the scheme of achieving the propagation characteristics of SAW device based on finite element analysis with ANSYS was proposed in this paper. In this scheme, the model of SAW device was built by the finite element analysis, and the parameter of the electrode and the substrate material was set. The geometry model of SAW device was meshed, and the continuous entity was divided into finite element model. The actual problems of boundary conditions and load in mechanical and electrical were applied to the model. By means of simulating a SAW device with center frequency at 100 MHz, the comparison and analysis between the simulation results and the theory results were presented. Experiments results confirm that the SAW energy is confined into a zone close to the piezoelectric crystals surface and is 1 to 2 wavelengths thick, and the amplitude and energy of the SAW will decrease rapidly with increasing depth.
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