Abstract
In order to overcome the simplicity and instability of micron cantilever membrane structure, sacrificial layer technology and multi-layer heterogeneous material composite stacking technology were designated. Based on the research with respect to a multi-layer heterogeneous cantilever beam structure, multi-layer heterogeneous material composite, and sacrificial layer release craft, different characteristics of sacrificial layer material and film preparation craft were analyzed. According to these results, the suitable film preparation craft was generated to reduce the stress between materials and to improve the reliability and percentage of finished products. Our work put multi-layer material composite micro-cantilever beam structure into practice, and accelerated the manufacturing of a micro-acceleration sensor and vibration sensor in the future.
Highlights
With the rapid development of information technology, sensor technology has become the key to science and technology in the 21st century
Selecting a reasonable sacrificial layer preparation process can complete the production of multi-layer material composite micron cantilever structure and lay the foundation for micro-acceleration sensors and vibration sensors
The preparation of the well-released layer with good support effect is the porosity and thickness and high removal selectivity, porous silicon is used the sacrificial key to realizing the cantilever beam structure
Summary
With the rapid development of information technology, sensor technology has become the key to science and technology in the 21st century. MEMS devices and micromachining technology have the characteristics of miniaturization, microelectronics integration, and high precision [3,4,5,6,7,8,9,10,11]. Micromachines 2022, 13, 144 and can be accurately controlled, and the removal rate is high It can be used as a sacrificial layer material in surface micromachining technology. As the residual stress in the suspended multilayer composite film is released after the sacrificial layer is removed, the microstructure is deformed. Selecting a reasonable sacrificial layer preparation process can complete the production of multi-layer material composite micron cantilever structure and lay the foundation for micro-acceleration sensors and vibration sensors
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