Abstract
In order to experiment study of CO2 laser machining polymer-based microfluidic chip, a laser micro-processing precision experimental table was built. A servo feed system directly driven by linear motor was designed to achieve high speed and high position accuracy. Dual-CPU open CNC system used Industrial Personal Computer(IPC) as master computer and PMAC controller as slave computer was constructed to ensure system real-time control. In order to increase position accuracy of precision table, a forecast model of the linear motor position error was put forward based on LSSVM and error compensation was processed. Research results indicated that the use of radial basis function of the LSSVM could improve linear motor position accuracy.
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