Abstract
In view of the reliability of micro electro mechanical system (MEMS) devices, the common failure modes and mechanisms of MEMS are introduced through a lot of data research and failure information collection. The key failure modes of MEMS (adhesion, mechanical fracture, and wear) and their failure mechanisms are further analyzed and summarized. Meanwhile, the corresponding prevention and improvement measures are put forward. The research results are helpful to guide the failure analysis and reliability design of MEMS devices in future.
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