Abstract
In order to reduce power consumption of thermal mass flow meter and prolong its working life as long as possible, we suppose that a MEMS cantilever beam could be used as switch in thermal mass flow meter. First, we discussed working principle of cantilever beam to confirm the feasibility as switch in circuit. Second, we analyzed its property by using the simulation model. The simulation results show that the bending degree of cantilever beam is not only associated with young's modulus of materials, and also related to cantilever size such as length, thickness and length to width ratio. Therefore, if we can choice suitable material and design reasonable dimension, the MEMS cantilever beam may be used as switch.
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