Research on Mechanical Properties of Micro-Electroforming Ni

Abstract

As one of the key techniques for manufacturing three-dimensional metal microstructure, micro-electroforming processing technology plays an important role in MEMS. Mechanical properties of micro-electroforming Ni have become a new research hotspot. This paper gives a brief overview of micro-electroforming Ni material’s mechanical properties. Due to the complexity and lack of standardization during micro-electroforming process, mechanical properties are found to be dependent on micro-electroforming process parameters and conditions. It is essential to reveal the essence of mechanical properties from microcosmic aspect. This paper briefly summarizes observation tools of microstructure and reviews the relationship of mechanical properties and microstructure. This work lays theoretical foundation for dynamic analysis and calculation of micro-electroforming Ni devices.