Abstract

A kind of inverted-mesa-type quartz resonator is proposed. Quartz resonators play an important role in modem electronic communication. AT-cut quartz resonators operating in thickness-shear (TS) mode are widely used in making piezoelectric resonators for its good frequency and temperature characteristics. The influence of the length of the quartz plate on the vibration coupling has been studied by introducing the three-dimensional (3-D) model with the finite element method (FEM). The inverted-mesa depth, and electrode radius were optimized according to the energy trapping effect and vibration coupling. Finally, the quartz resonator model with optimal inverted-mesa depth and electrode radius is obtained.

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