Abstract
Accelerant polishing is a new polishing technique based on the principle of diamond graphitization. It makes full use of the catalysis of transition metal such as Fe, Ti. In this paper, it researches on the trend of the graphitization of CVD diamond film at different temperature by DTA, TG, DTG and Raman spectra analysis. The results show that accelerant polishing technique can reduce the required conditions of graphitization, and carry out the graphitization reaction at a low temperature.
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