Abstract
Metalenses have recently attracted increased attention due to their remarkable characteristics. The fabrication technology of metalenses has also become an important research direction. In this study, we propose a metalens structure based on Au–MgF2–Au in infrared waveband. The preparation process of the metalens included magnetron sputtering, electron beam evaporation, and electron beam exposure. A dose test was performed during the exposure process, adjusting the exposure dose to minimize the proximity effect after exposure. Then, SEM was used to measure the processed metalens structure, and FDTD software was used to build a model based on the metalens, simulating and analyzing its focusing characteristics. The results show that the size deviation produced during the processing has little effect on the functionality of the metalens. The processed metalens can also focus different polarized light incidences at different spatial positions: The metalens can focus at 4.97 μm for x-polarized light and focus at 13.5 μm for y-polarized light. Additionally, the metalens has good focusing effects with different working wavelengths. We believe that the processing method of metalens proposed in this paper provides guidance for the preparation of subwavelength metasurface structures, and our findings are beneficial in developing new methods of near-infrared regime manipulation.
Highlights
Published: 8 March 2022Metasurfaces have characteristics that are not available in natural materials [1–9] and have obvious advantages in size, volume, processing [10,11], etc., meeting the requirements of miniaturization and integration in modern technology, making them key research objects for a large number of scientific researchers
scanning electron microscope (SEM) was used to measure the processed metalens structure, and FDTD software was used to build a model based on the processed metalens, simulating and analyzing its
SEM was used to measure the processed metalens structure, and FDTD software was used to build a model based on the processed metalens, simulating and analyzing its focusing characteristics
Summary
Metasurfaces have characteristics that are not available in natural materials [1–9] and have obvious advantages in size, volume, processing [10,11], etc., meeting the requirements of miniaturization and integration in modern technology, making them key research objects for a large number of scientific researchers. Metalens is different from the traditional lens; it has a subwavelength size, which is advantageous to the processing and miniaturization of the device. Based on the different wavelength and polarization states of the incident light, metalens can achieve a variety of different functions [15–24]. It has important applications in telescopes, cameras, and other imaging fields, as well as tunable devices, holographic displays, terahertz imaging, and nonlinear optics, and has great potential for development in the micro–nano field. Many metalens structures have been proposed before, their processing is more difficult and has rarely been elaborated in previous studies; the fabrication technology of metalens and focusing characteristics of the processed metalens have not been fully investigated
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