Abstract
薄膜反射镜将解决反射镜孔径与重量相互制约的问题. 采用静电拉伸法控制薄膜反射镜面形, 具有结构简单、反射镜面形易于控制等优点, 其原理为利用静电场上库仑力作用使薄膜产生面形变化, 生成所需的光学曲面. 由于薄膜变形力学, 以及静电场理论的复杂性, 目前薄膜成形及其面形控制在理论分析上仍未有定量的结果. 本文主要以单电极静电场中的薄膜反射镜面形为考察因素, 通过数值计算的方法得到薄膜反射镜上的静电力分布, 运用有限元分析获得该分布下的反射镜面形, 并将其与理想面形进行比较. 提出采用多电极闭环控制可获得更高的控制精度, 对静电拉伸薄膜的研究具有一定的指导意义.
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