Research on EFI multi-point synchronous initiation technology based on mems process

Abstract

In order to solve the problems of the warhead initiation system due to the low safety of conventional detonator arrays and the poor synchronization of the explosion logic network, as well as the MEMS batch integration requirements, a research on EFI multi-point synchronous initiation technology based on MEMS technology was carried out. Explosive foil was prepared by magnetron sputtering and photolithography. SU-8 photoresist flying sheet layer and acceleration chamber were prepared on the bridge foil by UV thick glue technology, and single-point, two-point parallel and three-point parallel were realized. The two batches of two and a total of four points and three strings of three and a total of nine points explosion foil initiators were batch-integrated and tested for the synchronism of the flying sheet effect. The test results show that the average time between two points, three points, and four points is less than 80ns, and the synchronization time is small; the average time at nine points is less than 200ns, and the synchronization time is large.