Abstract
This paper introduces a detection method that uses a white-light interference microscope to scan along the circle of latitude line to detect defects on the entire surface of microsphere with a diameter of 2mm. The surface of the microsphere is exposed under the white light interference microscope from the top to the equator in turn according to the annular belts of different latitudes to make the acquired image cover the entire surface of the ball. The topography data is processed, the defects are identified, and the number of defects of different horizontal and vertical sizes is counted, so as to achieve the quantitative evaluation of the surface defects of the small ball.
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