Abstract
Coplanar capacitive sensors have been widely applied in many fields with its characterstics of non-invasion, lowcost and fast response. A complex structure of coplanar capacitive sensor is designed to be used for the film thickness measurement. Firstly, three types of coplanar capacitive sensors with different shapes are designed, and according to the experimental reuslts, the parameters affecting the sensor signal strength and sensitivities are discussed, the electric field distributions of sensors are simulated by COMSOL.Then the fringe capacitance of a series of spiral-type sensors are measured and analyzed. The experimental results indicate the rational geometrical parameter design about the coplanar capacitive sensor can improve the sensor performance obviously.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
