Abstract
A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.
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