RESEARCH ON BULK MICRO-MACHINED MICROELECTRODE BIOSENSOR

Abstract

A new silicon-based amperometric microelectrode biosensor produced using bulk micromachining technology is presented here. Bulk micromachining, platinization and polymerization of pyrrole enhance sensitive coefficient, thus helping to miniaturize its dimensions and reduce unit cost. To our knowledge, platinization and polymerization of pyrrole is first used consecutively for microelectrode surface modification. Successful experimental results have been achieved for glucose detection. Compared to conventional amperometric biosensors and amperometric microelectrode biosensors made with surface micromachining technology, it has several advantages, such as smaller sensing surface area (1 mm × 1 mm ), lower detection limit (1×10-4 M ), larger sensitive coefficient (39.640 nA mM -1 mm -2), broader linear range (1 × 10-4-1 × 10-2 M ), better replicability (3.2% RSD for five respective detections) and stability (enzyme efficiency remains well above 95% after being stored for a month), easier to be made into arrays and to be integrated with processing circuitry, etc.