Abstract
Sensitivity table method (STM), which is a most widely used computer-aided alignment technology in optical system alignment, faces a problem that is how to determine the correctness of the applied object and established sensitivity table. In order to solve the problem, two criteria for applying STM correctly are concluded, one is determining the linearity relation between misalignments and wavefront aberration, the other one is establishing the effective sensitivity table by monitoring its condition number. Two optical systems are tested in this paper, and experimental results show the correctness of the proposed method.
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