Abstract
The mechanical structure and load changes of nano positioning stage cause a poor accuracy of the control system. For solving the problem, Adaptive PID control algorithm was applied to control the nano positioning stage. The model of nano positioning stage was established on the basis of Controlled Autoregressive Moving Average model (CARMA). The parameters of controller were identified based on Recursive Extended Least Squares algorithm (RELS). The control system of nano positioning stage was steady through 4ms after parameters identification, which static error was less than 5nm. The experimental results demonstrated that adaptive PID control algorithm was able to identify the parameters of controlled object and calculate the parameters of controller. The accuracy of control system can be at nanometer resolution.
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