Abstract

The article presents a novel micro-pressure sensor based on magnetic fluid. Some characteristics of the sensor are determined by theoretical predictions based on the state equation of ideal gas. The variation of external pressure will lead to the compression of a chamber between the body and mobile part, and a corresponding signal occurs. A comparison between inductance detection mode and magnetic field detection mode is performed by means of the transfer characteristics. The proposed device might be used as a micro-pressure sensing device with the advantages of low cost, simple structure, and convenient replacement.

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