Abstract
A new type of rigid-flexible coupling three degrees of freedom (3-DOF) micro-positioning platform with high positioning accuracy and high bearing capacity is developed, which consists of flexible drive mechanism and rigid platform. The flexible drive mechanism consists of three sets of symmetrical parallel round flexible hinge structures, each with a wedge structure in the middle of the symmetrical parallel flexible hinge. The rigid platform has an inclined plane with the same angle as the wedge, while the wedge structure is used to achieve the self-locking effect. The flexibility matrix method and ANSYS are used to analyze the statics of the flexible drive mechanism. The first four natural frequencies of the platform are obtained by dynamic simulation analysis. A symmetrical rigid flexible coupling micro-positioning platform experimental system is developed. Output characteristics, positioning accuracy, relationship between frequency and amplitude, and bearing performance of the micro-positioning platform are tested. These experimental results obviously show that the micro-positioning platform has good motion characteristics, high positioning accuracy, large movement distance, and large load bearing capacity performance.
Highlights
Flexure hinge has the advantages of convenient processing, low cost, easy realization of miniaturization and high positioning accuracy
It is often used in ultra-precision instruments such as micro motion device, micro-positioning device, precision positioning stage in atomic force microscope, optical automatic focusing system and optical fiber docking device
Li et al [13] developed a flexible hinge motion platform with laminated structure based on the limited operators of electron microscope
Summary
Flexure hinge has the advantages of convenient processing, low cost, easy realization of miniaturization and high positioning accuracy. Kim et al [15] designed a fast tool servo mechanism based on flexure hinge, which is mainly used for diamond turning microstructure manufacturing Because of these extensive applications, the flexible hinge 3D mobile platform has important research value in its operation range, operation accuracy, natural frequency, resolution, decoupling, degree of freedom, stability, anti-interference ability and other aspects [16,17]. In order to solve the decoupling problem, a closed-loop feedback method was adopted, with a bandwidth of 100 Hz. Guo et al [26] designed a compact 3-DOF micro/nano positioning platform based on the plane control principle of three piezoelectric actuators. In order to make the micro-positioning platform have larger bearing capacity and higher positioning accuracy, a new rigid flexible coupling 3-DOF micro-positioning platform is designed by using parallel circular flexure hinge as micro-positioning mechanism and piezoelectric ceramic actuator. The motion characteristics, positioning accuracy, and bearing capacity of the micro-positioning platform are tested
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