Abstract
This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity ( R 2 = 0.9998 ), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW. Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect. Moreover, the sensor chip was small in size, rugged, and highly accurate.
Highlights
Water is closely related to human life and is an important factor affecting human health
The microtemperature sensor manufactured in this paper is a Pt resistance temperature detector (RTD)
A water bath was used to heat the temperature sensor from 0°C to 50°C (the water temperature was monitored by a commercial temperature sensor (TES1310)), and a multimeter (17B+, Fluke) was used to measure the resistance of the Pt RTD
Summary
Water is closely related to human life and is an important factor affecting human health. Glass electrodes have some disadvantages, such as being bulky and fragile. To overcome these shortcomings, several scientific research teams have conducted research and developed new pH sensors, for example, fiber-optic pH sensors [5] and ion-selective field-effect transistor (ISFET) pH sensors [6], which have received attention in recent years. PH sensors consisting of a conductive polyaniline (PANI) polymer have been reported. PANI most often exists in the form of an intermediate oxidation state (emeraldine base (EB)). PANI can be converted from an intermediate state to a full benzene structure
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