Abstract
Abstract In order to coat TiZrV alloys on the inner-surface of slender vacuum pipe of accelerator, a set of DC (Direct-Current) diode magnetron sputtering system was set up through calculation. After sputtering deposition, it translates the vacuum pipe from gas source into a pump. The test results show that the ultimate pressure is lower and the problem of big pressure gradient distribution is solved after TiZrV NEG coating.
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